Abstract
Radio-frequency (RF)-sputtered indium thin films were prepared and processed in ultrapure water at 368 K (95 °C) for various time durations. The processed samples were poor in crystalline quality and indexed as cubic phase for the samples processed for more than 12 hours. A rhombohedral to cubic phase was also observed. Photoluminescence (PL) and Raman spectra showed few dominant peaks at ~385, ~515, and ~675 and at ~203 and 495 cm−1 as oxygen deficient cubic In2O3 with nanostructured In2O3, respectively.
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