Abstract
ZrO2 and Y2O3-doped ZrO2 gel films were obtained by spin-coating of a sol from Zr-n-propoxide, n-propanol, acetylacetone, water, and nitric acid on a silica glass as a substrate. The dried-gel films crystallized to monoclinic, tetragonal, cubic and their mixed phases, depending on the firing temperature and Y2O3 content. The ZrO2 films with highly preferential orientation were successfully obtained from a solution containing a large amount of n-propanol. The highly oriented ZrO2 film was found to have high transparency compared with the non-oriented films.
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