Abstract
The effects of UV-irradiation on the properties of ZrO2 and TiO2 gel films prepared from corresponding metal-butoxides modified with acetylacetone (AcAc) or benzoylacetone (BzAc) have been studied. It was found that the chelate bonds of β-diketones remaining in the gel films were dissociated by the UV-irradiation. The UV-irradiation also changed the properties of the gel films such as solubility; the solubility in acidic solutions was decreased for ZrO2 gel films modified with AcAc and TiO2 gel films modified with BzAc became insoluble in alcohol. Based on these findings, a new fine-patterning process has been established, which enables us to make fine-patterns of ZrO2 and TiO2 films on a variety of substrates.
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