Synthesis of focusing-and-deflection columns

Abstract

Szilagyi and Szep have demonstrated that focusing lenses of high performances can be constructed from a column of circular plate electrodes. Later, Szilagyi modified that system to include dipole, quadrupole, and octupole components by partitioning each plate into eight equal sectors. It has already been shown that the additional quadrupole components can indeed bring about substantial improvements in the focusing of charged particle beams. In this article, that design procedure is expanded to construct columns capable of both focusing and deflecting particle beams by just introducing additional dipole components. In this new design, the geometry of the system remains unchanged. The only extra complication is the demand for more individual controls of the sector voltages. Two sample designs, one for negative ions and one for electrons, are presented showing that in both cases a ±2.3 mrad diverging beam can be focused down to a spot of less than 50 nm in radius over a scanning circular area of radius 0.25 mm. The details of the two systems are given in Sec. IV along with the source conditions. The performance of the negative ion system is found to be comparable to the published data. For the relativistic electron system, the interaction of individual components to reduce various aberrations is investigated.