Abstract
Diamond-like hydrocarbon (DLHC, a-C:H) films were synthesized under atmospheric pressure filamentary by dielectric discharge (FDBD) to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD). GDBD is generally used for atmospheric pressure-plasma-enhanced chemical vapour deposition. The discharge form transitioned from GDBD to FDBD by increasing the gap between electrodes from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard DLHC films can be synthesized at room temperature and on a large area under atmospheric pressure using FDBD.
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