Abstract
ABSTRACTThe synthesis of two new tert-butyl carbonic anhydride monomers, 4-vinylbenzoic and methacrylic tert-butyl carbonic anhydride was achieved successfully. Radical polymerization at 45°C yielded tert-butyl pyrocarbonate protected materials. Thermographic analysis showed that both polymers decompose cleanly at 135°C. The lithographic performance of both materials was evaluated in presence of 2,4,6-tris-(trichloromethyl)-s-triazine as photoacid generating species. It was demonstrated that the large polarity change resulted in a chemically amplified positive photoresist system
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