Synthesis and properties of ionic conduction polymer for anodic bonding

Abstract

Abstract In this study, powders of polyethylene oxide (PEO) and lithium perchlorate (LiClO 4 ) were used as the raw materials for producing the ionic conduction polymer PEO–LiClO 4 with different complex-ratios and used for anodic bonding through high energy ball milling method, and meanwhile, X-ray diffraction, differential scanning calorimetry (DSC), ultraviolet absorption spectrum test analysis, and other relevant methods were adopted to research the complexation mechanism of PEO and LiClO 4 and the impact of the ionic conduction polymer with different complex-ratios on the anodic bonding process under the action of the strong static electric field. The research results showed that the crystallization of PEO could be effectively obstructed with increased addition of LiClO 4 , thus increasing the content of PEO–LiClO 4 in amorphous area and continuously improving the complexation degree and the room-temperature conductivity thereof, and that the higher room-temperature conductivity enabled PEO–LiClO 4 to better bond with metallic aluminum and have better bonding quality. As the new encapsulating material, such research results will promote the application of new polymer functional materials in micro-electro-mechanical system (MEMS) components.