Abstract
Phase stability in 9.5 mol % yttria doped zirconia (YDZ) and pure zirconia thin films have been studied by transmission electron microscopy (TEM). Through detailed in-situ TEM analysis, we found that phase stability in nanoscale zirconia thin film depends on film thickness, grain size, and annealing ambient. Pure zirconia thin films of ~ 52 nm thickness were stabilized without any dopants at room temperature, while it transformed into a tetragonal phase upon heating to 400 oC. On the other hand, 9.5 % Yttria doping enables stabilization of the cubic structure regardless of grain growth. Annealing of poor crystalline YDZ films in air (oxygen rich) leads to tetragonal phase formation, while ultra-high vacuum (oxygen-deficient) annealed samples display cubic phase at high temperature.
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