Abstract

ABSTRACTGallium Selenide (GaSe) thin films were grown by the electrochemical deposition (ECD) technique on Indium tin oxide (ITO) and p-Si (100) substrates. The Electron paramagnetic resonance (EPR) spectrum of GaSe thin films’ growth on ITO was recorded at room temperature. According to EPR results, the g value of an EPR signal obtained for GaSe deposited on ITO is 2.0012 ± 0.0005. In/GaSe/p-Si heterojunction was irradiated with high-energy (6 MeV) and low-dose (1.53 × 1010 e− cm−2) electrons. The ideality factor of the In/GaSe/p-Si device was calculated as 1.24 and barrier height was determined as 0.82 eV from I–V measurements before irradiation. Acceptor concentration, built-in potential and barrier height of the In/GaSe/p-Si device were also obtained as 0.72 × 1014 cm−3, 0.65 eV and 0.97 eV from C–V measurements, respectively. After irradiation, the ideality factor n and barrier height Φb values of the In/GaSe/p-Si device were calculated as 1.55 and 0.781 eV, respectively. Acceptor concentration, the built-in potential and barrier height values of the In/GaSe/p-Si device have also shown a decrease after 6 MeV electron irradiation. This change in heterojunction device parameters shows that current transport does not obey thermionic emission, and thus tunneling could be active due to the defects formed by irradiation at the In–GaSe interface.

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