Synthesis and characterization of novel fluorinated naphthalene-based poly(arylene ether ketone)s with low dielectric constants

Abstract

At present, in the integrated circuit technology, the requirements for polymeric interlayer dielectric materials are getting higher and higher, such as high thermostability, high modulus, low dielectric constant, excellent processability. In this paper, some soluble fluorinated naphthalene-based poly(arylene ether ketone)s were prepared from three types of novel fluorinated naphthalene-based bisphenol monomers. With the introduction of fluorine atoms and naphthalene rings, the obtained polymers exhibited more excellent thermal stability than traditional poly(ether ether ketone),which the glass transition temperatures (Tg) were above 167 °C, and decomposition temperatures at 5% (Td5) were above 528 °C under nitrogen. The tensile strengths of membranes were in the range of 62.86–104.13 MPa, tensile modulus in the range of 1.96–3.83 GPa. Moreover, the poly(arylene ether ketone)s with 1-(3,5-ditrifluoromethylbenzoyl) (NPEEK-3) exhibited the lowest dielectric constant at 1 MHz and water uptake which were 2.57 and 0.31%, respectively. The dielectric constant is much lower than commercialized poly(ether ether ketone) of 3.3.