Abstract
Bi 4Ti 3O 12 (BT) and (Bi 3.25La 0.75)Ti 3O 12 (BLT) single-phase films, and artificially multilayered BT/BLT film, are prepared on Pt bottom electrode through acetylacetone-chelated photochemical sol–gel method. The multilayered BT/BLT film shows a remnant polarization of about 18.3 μC/cm 2, which is much higher than that of BT (4.7 μC/cm 2) and BLT (8.5 μC/cm 2) single-phase films. Both the BLT and the BT/BLT multilayered film show fatigue endurance up to more than 10 9 times. Through photochemical reaction between the chelated complexes and UV light, micro-patterned BT, and BLT film can be directly obtained without using photoresists.
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