Abstract
Abstract AlTiSiN/CrSiN multilayer coatings were deposited on Si (1 0 0) and cemented carbide substrates using Cr, AlTi cathodes and SiH 4 gases by cathodic arc ion plating system. The influences of SiH 4 gases flowrate on the structural and mechanical properties of the coatings were investigated, systematically. AlTiSiN/CrSiN coatings exhibit a B1 NaCl-type nano-multilayered structure in which the CrSiN nano-layers alternate with AlTiSiN nano-layers with multiple orientations of crystal planes indicated by XRD patterns and TEM. Si contents of the coatings increase with increasing SiH 4 flowrate. The hardness of the coatings increases to the maximum value of 3500 Hv 0.05 with increasing SiH 4 flowrate from 20 to 40 sccm and then decreases with further addition of SiH 4 gases. A higher adhesive force of 73 N is obtained at the flowrate of 48 sccm. The coatings exhibit different tribological performance when the mating materials were varied from Si 3 N 4 to cemented carbide balls and the variation of friction coefficients of the coatings against Si 3 N 4 influenced by SiH 4 flowrate are not obvious as against cemented carbide balls.
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