Abstract

CrCN–DLC composite coatings were deposited onto silicon (100) and cemented carbides substrates using pure Cr targets under C2H2 ambient by cathodic arc ion plating system. The influence of C2H2 flow rate on the structure and mechanical properties of the coatings was investigated systemically. The coatings structure and bonding state were characterized by XRD, Raman and X-ray photoelectron spectroscopy. The chemical composition was measured by EDS. The mechanical performance and tribological behaviour of the coatings were studied by a hardness tester and ball-on-disc wear tester. The results showed that with increasing C2H2 flow rate from 50 to 100sccm, the corresponding hardness of coatings increased firstly and then decreased with further addition of C2H2 flow rate. The coatings deposited at lower C2H2 flow rate (less than 200sccm) exhibited a relatively higher hardness value (more than HV0.0252000) and then the hardness decrease with increasing C2H2 flow rate. The friction coefficient also exhibited similar variation trend, when the C2H2 flow rate was higher than 100sccm, the friction coefficient decreased and then maintained in a relatively lower value from 0.18 to 0.24, which may be attribute to the increasing carbon content and the coating exhibited more diamond-like structure.

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