Abstract
The solid-solid interaction and thermal decomposition behavior of 2wt% Ag2O in ZnO powder have been investigated by using thermogravimetry analysis and differential thermal analysis. Ag2O, which remained stable in ZnO up to 200°C, was observed to be thermally decomposed to Ag+ ions in the temperature range of 200–250°C, suggesting that Ag+ ions were diffused into ZnO matrix. Based on thermal analysis, ZnO:Ag films have been fabricated on a (001) Al2O3 substrate using specifically synthesized Ag-doped ZnO target by pulsed laser deposition. The effect of (002) peak shift on the structural property of Ag-doped ZnO films has been systematically characterized to investigate the influence of the substitution of Ag+ for Zn+. Ag-doped p-type ZnO films have been successfully grown at a deposition temperature in the range of 200–250°C, which is in good agreement with thermally decomposed temperature for Ag2O to Ag+ in ZnO powder, with hole concentrations of 4.9×1016–6.0×1017cm−3, hole mobilities of 0.29–2.32cm2∕Vs, and resistivities of 34–54Ωcm. The effect of Ag doping in ZnO thin film has been systematically investigated and the p-type conduction mechanism has been proposed.
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