Abstract
Quaternary Cr-Al-Mo-N coatings were deposited on STS 304 steel and Si substrates by using a hybrid coating method of arc ion plating (AIP) for a Cr target and a dc magnetron sputtering technique for Al and Mo targets under a N2/Ar atmosphere. The synthesized Cr-Al-Mo-N coatings were mainly composed of a substitutional solid solution (Cr, Al, Mo)N. The maximum microhardness of the Cr-Al-Mo-N coatings was 35 GPa at a Mo content of 24.2 at.%. Moreover, the friction coe cient of the Cr-Al-Mo-N coatings drastically decreased from 0.9 to 0.48 with increasing Mo content from 0 to 33.2 at.% due to the formation of MoO3 which acted as a solid lubricant between the coating surface and the steel ball. However, the oxidation of Cr-Al-Mo-N coatings was observed at a lower temperature than that of Cr-Al-N coatings due to the low oxidation temperature of MoN.
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