Abstract
The uniformity of DLC film on the inner surface of a long pipe prepared by the Plasma Enhanced Chemical Vapor Deposition (PECVD) technique. Four gas inlet modes were used to deposit DLC coating in the tube with a diameter of 100 mm and 2000 mm in length. Firstly, the finite element method was explored to investigate the effects of pores distribution on the precursor gas density in the tube. The result showed the gas density distribution of case (iv) was uniform. Then, the film thickness, surface roughness, contact angle, the film structure, hardness were measured by a scanning electron microscopy, atom force microscopy, Raman spectrometer and nano indenter, respectively. The results revealed that the optimizing the gas pore distribution improved the uniformity of film thickness, roughness and hardness, which correspond with the finite element method. Furthermore, the thickness for case(iv) is about 4 μm with a uniformity of 3.8 %. The regions of thicker film were with higher gas density. This study indicates a feasible solution to obtain uniform DLC film in long tube by synthetically tailoring the input mode of precursor gas.
Published Version
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