Synergistically Microstructured Flexible Pressure Sensors with High Sensitivity and Ultrawide Linear Range for Full‐Range Human Physiological Monitoring

Abstract

AbstractHigh sensitivity and wide linear range are core performances for flexible pressure sensors in practical applications. Due to the trade‐off between sensitivity and linear range, developing high‐performance flexible pressure sensors with both high sensitivity and wide linear range through a facile method is still a great challenge. Herein, a synergistically microstructured flexible pressure sensor with fibrous and microdomed (FMD) structure composed of a fibrous conductive layer sandwiched between a microdome‐structured PDMS layer and an interdigital electrode is proposed. Ascribed to the synergistic effect of the FMD structure possessing multiple deformations, the resistance of the sensor varies sensitively and continuously under pressure. Consequently, the pressure sensors perform a high sensitivity (6.31 kPa−1), an ultrawide linear range (4.6 Pa–800 kPa), short response time (72 ms) and relaxation time (88 ms), and remarkable stability during 10 000 loading/unloading cycles under 127.4 kPa. These high performances allow the sensors to detect full‐range human psychological signals from low to high pressures, such as pulse, phonation, joint moments, and plantar pressure. Moreover, the synergistically microstructured sensors can be integrated into large‐area and crosstalk‐free sensor array to map the spatial pressure distribution, demonstrating their viable applications in personal physiological parameters monitoring and human–machine interfaces.