High‐Performance Flexible Pressure Sensor Based on Controllable Hierarchical Microstructures by Laser Scribing for Wearable Electronics

Abstract

AbstractFlexible pressure sensors are attracting considerable attention due to their potential applications in human health monitoring and human‐machine interfaces. However, it is hard to achieve both high sensitivity and wide linear detection range, and the complicated fabrication process restricts their practical applications. Herein, a simple and scalable fabrication process for a flexible pressure sensor with high sensitivity and wide detection range has been developed by combining the silver nanowires coated, laser‐ablated hierarchical microstructured polydimethylsiloxane, and an interdigital electrode. The hierarchical microstructures contribute to the high sensitivity of 4.48 kPa−1 and increase detection range from 0 to 65 kPa. The increase in the contact area and subsequent additional contact sites of the hierarchical microstructures lead to the high‐performance. Arterial pulse, breathing, and static tremors have been measured by attaching the device to the human body. Moreover, a pressure sensor array has been fabricated to illustrate the scalability of this strategy. The results demonstrate that the flexible pressure sensor with simple and scalable fabrication capability has promising applications in wearable electronic skins.