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https://doi.org/10.1021/acsaelm.4c01380
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Cite Journal: ACS Applied Electronic Materials |  Publication Date: Oct 1, 2024 |
Synergistic Effects of Deposition Temperatures for Active and Gate Insulator of Top-Gate Thin-Film Transistors Using InGaZnO Channels Prepared by Thermal Atomic-Layer Deposition
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