Abstract
Diamond-like carbon (DLC) films were deposited using the pulsed plasma-enhanced chemical vapor deposition (PECVD) method with different source gases such as methane (CH4), acetylene (C2H2), acetylene with methane (C2H2:CH4), ethylene (C2H4), and ethylene with methane (C2H4:CH4). The chemical characteristics of these DLC films were investigated using suitable spectroscopic techniques. Raman spectroscopy analysis illustrated decrease of the ID/IG ratio with the addition of CH4. Importantly, X-ray photoelectron spectroscopy (XPS) and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy not only enabled evaluation of the relative content of sp2 and sp3, but also clarified the chemical bonding of the films with different source gases. The XPS results showed lower sp2 content than the NEXAFS results. Moreover, glow discharge optical emission spectrometry (GD-OES) illustrated increase in the hydrogen content, which is in good agreement with increase of the sp3 content based on Raman, XPS, and NEXAFS analyses. Consequently, the synthesis and characterization indicate a significant role for differences of chemical composition of the films. The study described herein provides useful information for preparing high-quality DLC films, as well as for evaluating appropriately the distribution of the carbon sp2/(sp2 + sp3) ratio and the hydrogen content in the films with different source gases.
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