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Abstract
The diamond-like carbon (DLC) film on 316L stainless steel substrate was prepared by pulsed plasma-enhanced chemical vapor deposition, and the performance of the films was optimized by regulating the pulse voltage. Microstructure and properties of DLC film on 316L stainless steel were characterized by atomic force microscopy, field-emission scanning electron microscopy, Raman spectra, nano-indenter and electrochemical workstations. The results showed that DLC films with smooth and dense morphology have a low friction coefficient and high nano-indentation hardness, and the surface hardness of 316L stainless steel substrate was enhanced by more than 3 times. The mechanical properties of DLC films and their bond with 316L stainless steel could be further optimized by increasing pulse voltage. DLC films on 316L stainless steel substrate increased the self-corrosion potential by 0.173 V and decreased self-corrosion current by 99%, which significantly improved the anti-corrosive properties of 316L substrate.
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