Symmetry breaking of plasma induced by pressure in PIG ion source

Abstract

In this work, we use the COMSOL software to study the discharge characteristics of argon in the Penning ion gauge (PIG) ion source driven by DC voltage and based on a two-dimensional fluid model. The distribution of the electron density under different pressures is investigated. Our results indicate that, although the ion source has the symmetric geometry structure, the distribution of the electron density will lose the symmetry due to the change of pressures.