Abstract
Magnetron ion sources and PIG ion sources are sources of intense negative ion beams and multiply-charged positive and negative ion beams. They are composed of two electrodes, a sheath and a plasma. The author has classified them into magnetron (MG), inverse magnetron (IM), planar magnetron and Penning ionization gauge (PIG) ion sources. The PIG includes usual PIG, duoPIGatron and ANIS. The author has analyzed MG, IM and PIG ion sources from the point of view of energy efficiency of the input electron power. The theory used is a magnetron theory for MG and PIG, and an inverse magnetron theory for IM. It became clear for these ion sources that a device constant of mass dimension, k = e( r b B) 2/8 U 2 ( e: electron charge; r b, U 2: the position and the potential of the sheath; B: the magnetic flux density), was without exception on the order of 10 −30 kg, a little heavier than the electron mass, and that the ion sources operated with good theoretical efficiencies.
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