Abstract
AbstractThe undoped and Cd‐doped (0.4, 0.5 at.%) ZnO films deposited by radiofrequency magnetron sputtering have been irradiated by 167 MeV Xe26+ ions with energy to a fluence 3×1012 ions/cm2. The structure and vibrational properties of as‐grown and irradiated samples were studied using X‐ray diffraction and Raman spectroscopy techniques. It was found that Cd‐doped ZnO films in comparison with undoped films demonstrate an improvement of crystal structure due to increased size of X‐ray coherent scattering regions, relaxation of strain between grains in the films and reduction of modes which relates to defects in ZnO crystal lattice. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Published Version
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