Surface-relief gratings with high spatial frequency fabricated using direct glass imprinting process

Abstract

Surface-relief gratings with high spatial frequencies were first fabricated using a direct imprinting process with a glassy carbon mold at the softening temperature of phosphate glass. A grating with maximum height of 730 nm and 500 nm period was formed on the glass surface by the pressing at the softening temperature of glass under constant pressure of 0.4 kN/cm(2). Phase retardation of 0.1 lambda was observed between TE-polarized and TM-polarized light at 600 nm wavelength.