Abstract

In this paper, a consine-like function instead of a box or a Gaussian-like function is constructed as the pile-up doping in device channel near LDD. The surface potential distribution of nonuniform doping channel is obtained by using Gauss' Law. Threshold voltage roll-up is observed, which is due to the pile-up doping. The simulation results are verified by MEDICI numerical data.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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