Surface-micromachined thermoelectric infrared focal-plane array with high detectivity for room temperature operation

Abstract

Thermopile detectors are particularly well suited for spectral imaging, space science applications, track recording, presence detection and applications with low energy consumption. The purpose of this work is the fabrication of a surface-micromachined 2-D high detectivity thermopile array using a highly effective BiSb/Sb thermocouple materials combination. The thermoelectric array is built on 8×8 pixels with an active area of 100μm in square, which are wired directly. Thermopile structure and absorber area are manufactured upon a sacrificial layer based on polyimide, which is removed at the end of the manufacturing process. Thermoelectric layers as well as wiring layers has been patterned almost exclusively by lift-off technique in order to obtain very small structure dimension with high reliability as well as high integration level. The active area of detectors can be equipped with two absorber types for different application, a broadband colloidal silver black layer as well as a quarter wavelength arrangement for the MIR wavelength range from 8 to 14μm. The detectivity of so manufactured FPAs is about 1×109 Jones exceeding most of the state-of-the-art thermopile detectors.