Abstract
A novel single-source surface–volume–surface integral equation is proposed for accurate broadband resistance and inductance extraction in 3-D interconnects. The new equation originates in the volume integral equation (VIE) traditionally used for magneto-quasi-static modeling of current flow in 3-D wires. The latter is reduced to a surface integral equation by representing the electric field inside each conductor segment as a superposition of cylindrical waves emanating from the conductor's boundary. As no approximation is utilized and all underlying boundary conditions and pertinent equations are satisfied in the reduction, the new integral equation is rigorously equivalent to the solution of the traditional volume electric field integral equation. The rigorous nature of the proposed single-source surface integral equation is corroborated numerically. In this paper, a detailed description of the method of moments discretization for the proposed surface integral equation is also presented. Numerical solution of the proposed surface integral equation for a 12-conductor bond-wire package is used to demonstrate the accuracy of the method and its computational benefits compared to the traditional solution based on the VIE.
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