Surface treatment by the ion flow from electron beam generated plasma in the forevacuum pressure range

Aleksandr Klimov,T.Y Ovsyannikova,N.O Kopanitsa,A.A Klopotov,P.A Radchenko,V.S Plevkov,Aleksey Zenin,L.A Teplyakova

doi:10.1051/matecconf/201814303008

Abstract

The paper presents research results of peculiarities of gas ion flows usage and their generation from large plasma formation (>50 sq.cm) obtained by electron beam ionization of gas in the forevacuum pressure range. An upgraded source was used for electron beam generation, which allowed obtaining ribbon electron beam with no transmitting magnetic field. Absence of magnetic field in the area of ion flow formation enables to obtain directed ion flows without distorting their trajectories. In this case, independent control of current and ion energy is possible. The influence of electron beam parameters on the parameters of beam plasma and ion flow – current energy and density – was determined. The results of alumina ceramics treatment with a beam plasma ions flow are given.

Highlights

Electron-beam plasma generated while electron beam is transmitted through gaseous atmosphere of a vacuum chamber with the energy of several keV [1] is widely used in various material treatment technologies [2,3,4,5]
The research results showed that beam plasma concentration monotonically decreases while electron beam is transmitted from vacuum source to collector in a vacuum chamber (Fig. 2), as well as while distancing from the mean plane of the beam (Fig. 3)
From the point of view of effective interaction between beam electrons and residual atmosphere atoms and molecules, the use of low-energy electron beam is more advisable given the fact that ionization cross section corresponds to the energy regions of tens and hundreds eV [22]

Summary

Introduction

Electron-beam plasma generated while electron beam is transmitted through gaseous atmosphere of a vacuum chamber with the energy of several keV [1] is widely used in various material treatment technologies [2,3,4,5]. During transmission of a ribbon electron beam through gaseous medium of a vacuum chamber in forevacuum pressure range a large-area plasma formation is generated (more than 0.5 sq.m), which is called a plasma sheet [17].

Results

Conclusion