Abstract
A high sensitivity non-contact optical profilometer based on diffuse point differential interferometry has been developed and used to measure the surface profile of camshafts. The high sensitivity of the system is achieved through differential detection of the interference patterns of the scattered light. An electronic phase-lock feedback loop is used to control the quadrature condition and determine the surface height. Preliminary measurements show that the interferometer system is sensitive to surface height variations in the order of 0·002 μm. The influence of the surface speckles on the interference pattern is analyzed, and the performance of the diffuse point differential interferometer is evaluated. The system has the advantage of not having any moving mechanical parts which leads to fast and more accurate measurements of the surface contours.
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