Abstract

Controlling the design and adjusting the properties of nanoscale functional films produced with reliable low pressure plasma technology is a challenging field. Therefore, surface properties of plasma polymer nanocomposites deposited by simultaneous plasma polymerization and co-sputtering were characterized with various surface analysis methods. The amount and the size distribution of the Ag nanoparticles showed strong correlation to the process parameters power input and gas composition. The distribution and the availability of the Ag nanoparticles could be adjusted through the monomer gas flow rate changing the plasma polymer growth rate and the integration of the particles. Most of all, interesting features were obtained during the initial growth phase showing the interaction between plasma polymerization and Ag nanoparticle formation. Finally, the use of an additional reactive gas, e.g. carbon dioxide, led to an incorporation of functional groups enabling multifunctional properties.

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