Abstract

In this paper, a surface measurement method based on dual-scan positioning strategy is presented to address the challenges of irregular surface patterns and complex geometries. A confocal sensor with an internal scanning mechanism was used in this study. By synchronizing the local scan, enabled by the internal actuator in the confocal sensor, and the global scans, enabled by external positioners, the developed system was able to perform noncontact line scan and area scan. Thus, this system was able to measure both surface roughness and surface uniformity. Unlike laboratory surface measurement equipment, the proposed system is reconfigurable for in situ measurement and able to scan free-form surfaces with a proper stand-off distance and approaching angle. For long-travel line scan, which is needed for rough surfaces, a surface form tracing algorithm was developed to ensure that the data were always captured within the sensing range of the confocal sensor. It was experimentally verified that in a scanning length of 100 mm, where the surface fluctuation in vertical direction is around 10 mm, the system was able to perform accurate surface measurement. For area scan, XY coordinates provided by the lateral positioning system and the Z coordinate captured by the confocal sensor were plotted into one coordinate system for 3D reconstruction. A coherence scanning interferometer and a confocal microscope were employed as the reference measurement systems to verify the performance of the proposed system in a scanning area of 1 mm by 1 mm. Experimental data showed that the proposed system was able to achieve comparable accuracy with laboratory systems. The measurement deviation was within 0.1 µm. Because line scan mechanisms are widely used in sensor design, the presented work can be generalized to expand the applications of line scan sensors.

Highlights

  • An important tool for product quality assessment, surface texture measurements are traditionally performed based on laboratory systems, due to the high degree of measurement resolution required [1,2].Appl

  • With the rapid development of advanced manufacturing technologies, such as five-axis machining and additive manufacturing (AM), new surface measurement solutions are needed to address the challenges of complex geometries and irregular surface patterns [3,4]

  • Based on ISO 4287 [9], stylus profilometry is mainly used in line scan mode for conventionally machined surfaces with known directional surface patterns. 3D microscopy [10], such as confocal microscopy [11,12,13], coherence scanning interferometry [14,15] and focus variation microscopy [16,17], are suitable for area scans. 3D microscopic systems are able to determine surface roughness and surface isotropy based on ISO 25178-2 [18,19]

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Summary

Introduction

An important tool for product quality assessment, surface texture measurements are traditionally performed based on laboratory systems, due to the high degree of measurement resolution required [1,2]. Stylus profilometry is not an ideal solution for measuring surfaces with irregular patterns due to its contact measurement mechanism and flanking errors [7,8]. Another limitation of stylus profilometry is its low efficiency for areal surface texture measurement. Based on ISO 4287 [9], stylus profilometry is mainly used in line scan mode for conventionally machined surfaces with known directional surface patterns. Based on the above literature review and analysis, the motivation of this presented work is to develop an optical surface texture measurement system able to perform both line and area scans for challenging surfaces with complex geometry and irregular surface patterns. The proposed system has the potential to be utilized for in situ measurement [23,24]

Principle of Confocal Sensing with Internal Scanning
Principle
Surface
Surface Tracing Algorithm
Correction
Correction of Misalignment
Profile
Compensation
Dual-Scan Positioning Control for Surface Profiling
Experimental Verification
Robotic Vibration Test
Area Scan
As atorepresentative surface the laser confocal sensor
Long-Travel Line Scan
Conclusions and Future Work
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