Abstract

Diamond surface properties show a strong dependence on its chemical termination. Hydrogen-terminated and oxygen-terminated diamonds are the most studied terminations with many applications in the electronic and bioelectronic device field. One of the main techniques for the characterization of diamond surface terminations is X-ray photoelectron spectroscopy (XPS). In this sense, the use of angle-resolved XPS (ARXPS) experiments allows obtaining depth-dependent information used here to evidence (100)-O-terminated diamond surface atomic configuration when fabricated by acid treatment. The results were used to compare the chemistry changes occurring during the oxidation process using a sublayer XPS intensity model. The formation of non-diamond carbon phases at the subsurface and higher oxygen contents were shown to result from the oxygenation treatment. A new (100) 1 × 1:O surface reconstruction model is proposed to explain the XPS quantification results of O-terminated diamond.

Highlights

  • Diamond exhibits very interesting bulk properties, such as a wide band gap of 5.5 eV, a high thermal conductivity of >20 W/cm, and a high breakdown field of 10 MV/cm [1,2]. that make it suitable for high-power and high-frequency electronic applications

  • Oxygen-terminated surfaces can be obtained by a wide range of treatments such as acid treatments [9,10], oxygen plasma [11], or vacuum ultraviolet (VUV)/ozone [9,12], among others

  • In [32], this C1s maximum peak shift was related either to an upward band bending in H-diamond and to a downward band bending in O-diamond

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Summary

Introduction

Diamond exhibits very interesting bulk properties, such as a wide band gap of 5.5 eV, a high thermal conductivity of >20 W/cm, and a high breakdown field of 10 MV/cm [1,2]. that make it suitable for high-power and high-frequency electronic applications. Diamond exhibits very interesting bulk properties, such as a wide band gap of 5.5 eV, a high thermal conductivity of >20 W/cm, and a high breakdown field of 10 MV/cm [1,2]. Diamond surface properties are very attractive for bioelectronic devices due to their biocompatibility and good electronic performance. These properties are very sensitive to chemical changes and, the control and understanding of surface terminations are necessary for the implementation of diamond devices. The first is normally obtained by hydrogen plasma and shows a stable uniform 2 × 1 reconstruction, low roughness, a surface conductive layer, and negative electron affinity [3,4,5,6,7,8]. O-diamond has been linked to a higher Schottky barrier height in metal/diamond contacts [13] in comparison to that based on H-diamond

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