Abstract
Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.
Highlights
A coordinate measuring machine (CMM) is a measuring instrument that can measure three-dimensional (3D) shapes of an object, including a probing system to detect an object’s surface, a positioning stage system to move either the probing system or the object, length scales to determine the coordinate of detected points by the probing system, as well as software to control the entire measurement [1]
Other researchers, institutes, and companies have addressed the development of micro-/nano-CMMs [11,12,13,14,15,16,17,18]
There are different concepts for highly accurate CMMs, the representative specifications shown in Table 1 are important for micro-CMMs
Summary
Coordinate Metrology: A Review.A coordinate measuring machine (CMM) is a measuring instrument that can measure three-dimensional (3D) shapes of an object, including a probing system to detect an object’s surface, a positioning stage system to move either the probing system or the object, length scales to determine the coordinate of detected points by the probing system, as well as software to control the entire measurement [1]. X-ray-computed tomography has recently been developed [2,3], CMMs are still the most reliable measurement system for evaluating object shapes, dimensions, postures, and positions. CMMs with nanoscale accuracy have been in high demand for evaluating the dimensions and shapes of these micro-scaled products. Takamasu et al proposed the concept of a nano-CMM in 1996 [10]. Other researchers, institutes, and companies have addressed the development of micro-/nano-CMMs [11,12,13,14,15,16,17,18]. There are different concepts for highly accurate CMMs, the representative specifications shown in Table 1 are important for micro-CMMs. Many names for CMMs with nanoscale accuracy have been proposed; in this study, the term “micro-CMM” is used. The required specifications of micro-CMMs are approximately one-hundredth of the size of conventional
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