Surface scattering-dependent electronic transport in ultrathin scandium nitride films

Abstract

With the constant miniaturization of device technologies, it has become essential to understand and engineer the electronic properties of semiconductors in nanoscale dimensions. Scandium nitride (ScN), an emerging rock salt indirect bandgap semiconductor, has attracted significant interest for its interesting thermoelectric, plasmonic, neuromorphic computing, and Schottky barrier device applications. However, an in-depth understanding of the electronic transport, carrier scattering mechanism, and optical properties in ultrathin ScN films is still missing. Here, we show surface-scattering dominant electronic transport in epitaxial ScN films at nanoscale thicknesses. At the ultrathin dimensions, surface scattering increases significantly due to the large surface-to-volume ratio and growth-induced texturing. As a result, mobility decreases, and resistivity increases drastically with decreasing film thickness. Temperature-dependent electronic transport shows that the mobility of the ultrathin films decreases with increasing temperature due to the ionized-impurity and dislocation scattering. Electronic transport properties are further rationalized with x-ray diffraction and pole-figure analysis that shows that while the ultrathin films maintain their predominant 002 texture, their quality degrades with decreasing thickness. However, no significant changes are observed in the electronic structure of the films, as evidenced by x-ray photoelectron spectroscopy, photoemission measurements, and first-principles density functional theory calculations. Our results elucidate the impact of surface scattering on the ultrathin ScN films and would lead to miniaturized devices with improved efficiencies.