Abstract
AbstractWe observed (0001) AlN wurzite surfaces by atomic force microscopy after 500 nm regrowth in metal‐organic vapor phase epitaxy. The steps changed from double to single height with decreasing V/III ratio. The single height step edges were alternating smooth and rough due to the two different step types on (0001) wurzite surfaces. By reducing the V/III ratio, the widths equalize for terraces with smooth and rough edges, until Al terminated steps start to dominate, and thus promote again double height steps. Using in situ ellipsometry at nm under static conditions, we could directly identify three different surface reconstructions at high , low , and without which correlates with the different step terminations.
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