Abstract
We have used vicinal SrTiO3 substrates for improving and controlling the surface roughness of a YBa2Cu3Ox film. If we use a SrTiO3(100) substrate, the surface morphology of the film is abruptly degraded over a thickness equivalent to 15 unit cells. In contrast to using a SrTiO3(100) substrate, good surface morphology is maintained, even at 20-unit-cell thickness, when using a vicinal SrTiO3(100) substrate misoriented by 2°. The reason is that the effective terrace width produced by 2° misorientation is almost equal to the migration length of species on the growing surface. This is suitable for controlling the surface morphology of a YBa2Cu3Ox film.
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