Abstract
This investigation was conducted on the surface modification of various carbon by radio-frequency (13.56MHz) glow discharge plasmas with the objective of investigating the effects of fluoric gas plasmas on carbon surfaces and the mechanism of the elapsed variations of the various carbon surface after the plasma treatment. The surface of various carbon was treated by fluoric gas plasmas(SF6, CF4, C2F6, CHF3). The contact angles of water to the each carbon surface after the plasma treatment were measured and their elapse changes were investigated. The contact angle of three materiales increased by fluoric gas plasmas. CHF3 plasma was the most effecient of the plasmas we used. AG plate showed the largest angle in this case. Next we investigated the elapsed change of contact angle of each carbon material after CHF3 plasma treatment. The contact angle change with time was almost constant. The reasons for the elapsed changes are as follows. Three types in relation to the attachment of F atom are considered. In two types F part from the surface of materials. As a result, F quantity in surface decreases, and the contact angle reduces.
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