Abstract
A triode glow discharge system was used for the plasma treatment of polytetrafluoroethylene (PTFE) films and the formation of plasma polymerized hexamethyldisiloxane (PPHMDS) films on PTFE films. The nitrogen plasma increased the surface tension of the PTFE films to about 40 dyn/cm by applying an rf voltage to the substrate electrode. The contact angle of water on the PPHMDS films with the rf voltage was changed to 40°∼90° by corona discharge exposure for 30 s at 6 kV. This reduction is due to the decarbonization and the oxidation of PPHMDS films.
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