Abstract
The SnO 2–Fe 2O 3 thin film sensors with added platinum are studied. The gas-sensing materials (Fe 2O 3 and SnO 2) have been prepared from pentacarbonyl iron [Fe(CO) 5] and tin tetrachloride (SnCl 4) by plasma enhanced chemical vapor deposition method. In order to improve gas-sensing properties, the deposited films are dipped into an aqueous solution of H 2PtCl 6·6H 2O and heat-treated to form the Pt modified SnO 2–Fe 2O 3 thin film sensors. The surface composition of the Pt modified thin films has been studied by means of X-ray photoelectron spectrum. The electrical properties of the prepared sensors and the effect of Pt addition on the gas-sensing characteristics have also been investigated.
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