Abstract
The gas-sensing characteristics of Fe 2O 3 thin films prepared by the electron-beam evaporation method are presented. The Fe 2O 3 films show a high selectivity and sensitivity to petrol vapours. The response and recovery times and reproducibility of the gas-sensitive elements are studied. The obtained results shows the possibility of using Fe 2O 3 thin films as material for semiconductor thin-film petrol vapour sensors.
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