Abstract
In order to join metals to graphite or ceramics by soldering or brazing, a new surface modification method using induction heating was developed for graphite and ceramics. Such source metals as Cu, Ni, Cr, etc. were induction-heated in vacuum atmosphere and making deposited films on the deposition substrate, or the target substrate; graphite, AlN, Si3N4. The applicability of this method was investigated and the deposited layer was analysed by SEM observation, Auger electron spectrum analysis, X-ray diffractometry, and EPMA. By comparison of ambient vacuum pressure during deposition and the saturated vaopr pressure of source metals, this method was considered to utilize the sublimation phenomenon.
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