Abstract
Fabrication routine of piezoelectric micromachined ultrasonic transducer (pMUT) requires complex and repetitive processes which consumes a lot of time and very costly. Deposition of Polydimethylsiloxane (PDMS) as an adhesive layer on silicon substrate has been done using spin coating. The role of this bonding is to adhere the Lead Zirconate Titanate (PZT) wafer. Another layer of PDMS is deposited on top of the PZT to manipulate device’s performance and also acting as protection layer. The thickness of the PDMS is controlled by the amount of current applied to to D.C. motor. The current used in this study is 1.0 A, 1.2 A and 1.4 A. The performance characteristic of pMUT is done by analysis the electrical properties. High resolution images of surface topography produced by Scanning Electron Microscopy with Energy Dispersive X-ray spectroscopy (SEM/EDX) and Atomic Force Microscopy (AFM) showed that the surface of the PDMS coating was smooth. It is better for wetted/submerged underwater application that require minimum hydrophobic characteristics of the acoustic matching layer. The results clearly proved that this wafer bonding process can simplified the fabrication routine of Piezoelectric Micromachined Ultrasonic Transducer (pMUT) without compromising the performance of the device.
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