Abstract
A polymeric splitter film with input/output apertures on the surface is presented for multilayer optical circuits. We fabricated the surface input/output splitter via an ultraviolet imprint method using a mirror-integrated master. To fabricate the master, waveguide patterns were formed on a silicon wafer using a deep reactive ion etching method, and 45° angled mirrors as beam reflector were constructed at the waveguide core patterns via a V-sawing technique. We subsequently manufactured 1×2 and 1×4 surface input/output optical splitters and measured the optical characteristics of the splitters.
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