Abstract
Ultraviolet nanoimprint lithography (UV-NIL) has advantages such as room-temperature operation, high through-put, and high resolution. In the UV-NIL process, the mold needs a release coating material to prevent adhesion of the transfer resin. Usually, fluorinated silane coupling agents are used as release coating materials. To evaluate the release property, surface force analyzer equipment was used. This equipment can measure the surface forces between release-coated or noncoated mold material surfaces and UV-cured resin surfaces in the solid state. Lower surface forces were measured when a release coating was used on the mold material surface.
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