Surface failure mode evaluation of pure AlN and AlN with Al2O3(0.1 μm) oxide layer by microscratch testing

Abstract

The surface scratch resistance, damage evolution and damage detection during microscratching of pure AlN and AlN with an Al2O3 oxide layer (∼0.1 μm) were investigated. The microscratch experiments were performed in a progressive load-ramped mode where the load was linearly increased from 0 to 3 N as the scratch progressed with a loading rate of 0.2 N/min. The experiments resulted to two different failure mechanisms; Ductile scratching and fracture dominated scratching. In the case of pure AlN, inconsistent different kinds of damages were found to initiate at low critical load measured as 0.30 N. This critical load was also found to decrease with increasing the surface roughness, material density and grain size of AlN. In the case of pure AlN with an Al2O3 oxide layer, the critical load for crack initiation was measured as 0.45 N, higher than pure AlN. This critical load was found to generate uniform discontinuous chipping. The distance between these defects decreased and the failure mode gradually transformed to continuous chipping as the scratch progressed. The surface modification of AlN with the use of an Al2O3 oxide layer was found to improve the tribological properties of AlN.