Abstract
A study has been made on the surface of polycrystalline molybdenum bombarded with H2+ or He+ at energies of 15–40 keV at dose rates of 0.6–2.1 mA/cm2 to doses below 38 C/cm2 at temperatures of 250–830°C. The results show that there is no qualitative difference between the erosion properties of H2+ and He+, but that the erosion yields of He+ are about an order of magnitude larger than those of H2+. At relatively high dose rates, erosion enhancement occurs, with yields several times as large as sputtering yields. This enhancement is usually suppressed to some extent because of the surface roughness formed in the erosion process. The properties and the mechanisms of these phenomena are discussed.
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