Abstract
The surface reduction of higher oxide WO3 under irradiation by He+ ions with the energies 1 and 3 keV in a high vacuum is investigated by X-ray photoelectron spectroscopy. It is found that lower WO2 and intermediate WOx (2 < x < 3) oxides form first in WO3 surface layers under He+ ion bombardment, and with an increase in the irradiation dose metallic tungsten forms. It is shown that the degree of irradiated oxide surface metallization increases with an increase in the energy of the bombarding He+ ions. A comparison of WO3 oxide surface composition modification under He+ and Ar+ ion irradiation is presented.
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Schedule a callMore From: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
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