Abstract
Measurement of the energy distribution of backscattered noble gas ions yields information regarding the elemental composition of the first atomic surface layer. An instrument based on this principle and designed for routine surface analysis will be described. This flange-mounted device is comprised of an electron bombardment ion source, an electrostatic energy analyzer, a channel electron multiplier, and a multiple sample holder. Primary ion beam energies range from 100–2000 eV at current densities up to 50 μA/cm2. A depth profile of the surface constituents is obtained by utilizing the probe beam to selectively sputter clean the surface. Observations show the ability to resolve elemental isotopes, such as Cu63 from Cu65. Surface analyses are shown for 304 stainless steel, Cu, Ni, and ZnTe.
Published Version
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