Surface Charge Measurement with High Spatial Resolution Using Electrostatic Probe

Abstract

In the case of charge distribution measurement on an insulating material using an electrostatic probe, an inverse calculation from the probe output to the charge distribution is inevitable, because the probe output is influenced by the surface charges on the entire surface of the measured object. Signal-processing techniques have been adopted to improve the stability of such inverse calculation. The spatial resolution of measuring system is discussed in terms of the transfer characteristics in spatial frequency domain.